Micro Machining System

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::About us

::Facts Sheet

__ Markets & Applications

::MEMS Technology

.Inertial Sensors

.Pressure Sensors

.Si Microphone

.Inkjet Heads

.RF MEMS

.BioMEMS

::3D Semiconductor

.Passive Devices

.Power Devices

.3D Integration

__ Product Solutions

::Introduction

::High Selectivity Kit

::I-Productivity Kit

::Fast MFC's

::Fast Throttle Valve

::OES Endpoint Detection

::Interferometric camera

::EPD on He leak

::Dielectric Etching

::Heated Liner

::Pin-type ESC chuck

::Bevel Edge ESC chuck

::Integrated cold trap

::Atmospheric robot

__ Process Solutions

__ Customer Support

::Introduction

::Contacts

::On site Service

::Quotes & retrofits

::Spare Parts

::Training

::Quality

__ Publications

::Technical publications

::Press releases

::Magazine Articles

::AMMS propose new Parts (Refurbished and Brand new parts) and portfolio service

::Alcatel Micro Machining Systems (AMMS) and WESI Technology Limited (WESI) Reach Maintenance and Repair Services Agreement

::Tegal Corporation agrees to acquire Alcatel Micro Machining (AMMS)

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