The I-Productivity solution allows wider process range and control, leading to:

     ·          High etch rate
     ·          Uniformity across the wafer
     ·          Better repeatability & stability
     ·          Lower cost of ownership (by the way of possible C4F8 consumption decrease)

This upgrade allows improving original AMS200 I-Speeder and AMS100 I-Speeder with specific hardware. This kit includes:

     ·          Fast MFC’s response time for best gas phase separation
     ·          Fast acting valve for optimized pressure control for each cycles
     ·          Integrated Cold trap on pumping line for better maintenance
     ·          D-NET communication for faster communication & parameters monitoring
     ·          Heated Liner 

The I-Productivity solution brings its best performances combined with ESC-P type substrate-holder