Customer Support
Spare Parts
AMMS organization manages local inventories connected to main inventory in France through logistic platforms.
Several kinds of parts or process are available:
- Brand new
- Standard exchange
- Second-hand
Do not hesitate to contact our local supports or Headquarters Every return product should be accompanied by:
1. Return Material Authorization number (RMA#).
Please ask it to mms-support@alcatelmicromachining.com or +33 (0)4 50 65 79 09 (France)
2. Safety questionnaire for parts in contact with plasma (pumps, pumping line, gauges, subtrat holder, transfer, source, reactor, …):
Please fill up the questionnaire below
You wish to return a part from AMMS equipment for maintenance or expertise. The component will be dismantled and cleaned by a technician from our Service Center.
In compliance with European Community’s L360 directives, French labor code L231 - R231 and Federal OSHA Safety Standard 1910-1200, Alcatel Micro Machining Systems requires this form to be completed to preclude the potential health risk to its service personnel that can occur when receiving, disassembling, or repairing potentially contaminated products.
Parts returned without this form completed and secured to outside of package will be returned to customer unprocessed.
Pumps or chiller must be drained of fluids and residue, securely packaged and shipped prepaid. Concerning the closing of the ports (inlet & outlets of the product), metallic airtight blank flanges should be used if toxic or copper gases have been pumped.
We wish to draw your attention to the following points:
The risk may be of the following nature:
- Chemical risk: Danger to health, risks of explosion, fire, risks for the environment. Please indicate the chemical formula and name of the gases or substances that have been in contact with the equipment (pump or helium detector).
- Biological risk: Pathogenic germs, micro-organisms (bacteria, viruses, etc.) classes 1 to 4 and group E. We are currently unable to deal with contamination of this sort without risk to the safety of our staff. If your equipment has been contaminated in this way, contact us so that we can try to find a solution together.
- Radioactive risk: Contact us in this case.
- Copper contamination risk: Copper based by products formed in sputtering or etching processes are considered as a poison in some semi-conductor processes.
If following inspection and quotation, customer elects to not proceed with repair, he will be subject to service fee to cover product decontamination, disassembly, cleaning and evaluation costs.
Please fill the form, print it and attach it to the product before shipping to the service-repair office closest to you.
 Safety questionnaire |